发明名称 Semiconductor device and its manufacturing method
摘要 A semiconductor device comprising: an SOI substrate having a surface semiconductor layer, a gate electrode formed on the surface semiconductor layer via a gate insulating film, first conductive type source/drain regions formed in the surface semiconductor layer of both sides of the gate electrode, a second conductive type drawing diffusion layer formed in the surface semiconductor layer and contacted with at least one of the first conductive type source/drain regions, and a silicide layer which is formed on the surface semiconductor layer to partially or entirely overlie both said at least one of source/drain regions and the drawing diffusion layer, the silicide layer being grounded.
申请公布号 US6806539(B2) 申请公布日期 2004.10.19
申请号 US20020173764 申请日期 2002.06.19
申请人 SHARP KABUSHIKI KAISHA 发明人 AOKI HITOSHI
分类号 H01L27/08;H01L21/8238;H01L21/8244;H01L21/84;H01L27/092;H01L27/11;H01L27/12;H01L29/786;(IPC1-7):H01L31/039 主分类号 H01L27/08
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