发明名称 VACUUM SUCTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a vacuum suction device which prevents leakage of washing liquid from a clearance in cleaning, and sufficiently removes and cleans contaminants such as grinding chips, falling abrasive grains, etc. residing in a porous body on a placing part. SOLUTION: This suction device 1 is furnished with: the placing part 2 made of the porous body to place a sucked article 5; a supporting part 3 to surround and support an outer edge of the placing part 2; and a suction part 4 formed on the supporting part 3. At least an outer edge side surface of the placing part 2 is previously treated to seal pores on it, and, thereafter, the placing part 2 is connected to the supporting part 3. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004358598(A) 申请公布日期 2004.12.24
申请号 JP20030159138 申请日期 2003.06.04
申请人 TAIHEIYO CEMENT CORP;NIHON CERATEC CO LTD 发明人 MORI MASAHIRO;SASAKI SHUNICHI;ISHINO TOSHIHIRO;SATO SHINYA;OGURA TOMOYUKI;SHIOGAI TATSUYA
分类号 B25J15/06;H01L21/68;H01L21/683;(IPC1-7):B25J15/06 主分类号 B25J15/06
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