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发明名称
APPARATUS FOR TREATING SUBSTRATES, APPARATUS AND METHOD FOR CLEANING SUBSTRATES
摘要
申请公布号
KR100693252(B1)
申请公布日期
2007.03.13
申请号
KR20050030805
申请日期
2005.04.13
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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