发明名称 Solid-state imaging device
摘要 The invention is regarding to solid-state imaging device. A solid-state imaging device consistent with the present invention includes, a plurality of unit cells on a semiconductor substrate of a first conductivity type, each unit cell including a photoelectric conversion unit comprising a photodiode having a diffusion layer of a second conductivity type and a signal scanning circuit unit; a trench isolation region for isolating the photoelectric conversion unit from the signal scanning circuit unit, the trench isolation region being formed in the semiconductor substrate; a first element-isolating diffusion layer of the first conductivity type formed under a bottom face of the trench isolation region down to a position deeper than the diffusion layer of the photodiode from the surface of the semiconductor substrate.
申请公布号 US7262396(B2) 申请公布日期 2007.08.28
申请号 US20020287707 申请日期 2002.11.05
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 INOUE IKUKO;YAMASHITA HIROFUMI;NOZAKI HIDETOSHI
分类号 H01L21/00;H01L27/00;H01L27/146;H04N1/028;H04N5/335;H04N5/367;H04N5/369;H04N5/374 主分类号 H01L21/00
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