摘要 |
A method for manufacturing oxide-based nano structures is provided to form nano structures having a uniform composition reproducibly in a relatively low cost. A method for manufacturing oxide-based nano structures includes the steps of: (10) coating the surface of a substrate with a mixture solution in which an organic material precursor comprising M(wherein, M is a transition metal or semimetal element) is dissolved in an organic solvent; (20) heat-treating the mixture solution-coated substrate to form nano nuclei having a composition of MxOy(wherein, x is an integer of 1-3 and y is an integer of 1-6) on the substrate; (30) growing the nano nuclei to form nano structures having a composition of MxOy while supplying the M-containing reaction precursor to the nano nuclei; and (40) heat-treating the nano structures. Further, the M is one transition metal selected from a group consisting of Ti, V, Cr, Zn, Y, Zr and Nb.
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