| 摘要 |
PURPOSE:To remove interfering ions by energy filtering in a superimposed field type SIMS. CONSTITUTION:It is very difficult to analyze the mass with interfering ions under double-focusing conditions in a superimposed field type mass spectrometer as shown in the figure A. Under no double-focusing conditions, energy dispersion occurs as shown by the figure B or C. When the mass with no interfering ions is to be analyzed, a superimposed field section is set to satisfy the double- focusing conditions, and when the mass with interfering ions is to be analyzed, the superimposed field section is set out of the double-focusing conditions. Energy filtering can be performed, and interfering ions can effectively be removed. |
