| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor sensor, a radiation detector, and a radiation monitor having high reliability by reducing effect of vibration or static electricity. SOLUTION: Conductive layers 16a, 16b are provided through an insulator 15, oppositely to negative and positive electrodes 12a, 12b of a semiconductor element 11 for detecting a radiation, and a shield case 3 and the conductive layers 16a, 16b are fixed at the same potential of 0V voltage, and thereby a stray capacitance between the shield case 3 and the conductive layers 16a, 16b is reduced. Hereby, since a ground stray capacitance of the semiconductor sensor 1 is scarcely fluctuated, even if the interval between the shield case 3 and the conductive layers 16a, 16b is changed slightly by vibration of the semiconductor sensor 1, the semiconductor sensor 1 having high reliability without a vibration noise can be acquired. Since the radiation detector 10 is constituted by storing the semiconductor sensor 1 and a preamplifier 2 in the shield case 3, influence of an external electromagnetic noise can be reduced. COPYRIGHT: (C)2008,JPO&INPIT
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