| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure measuring device 185 capable of determining a gas pressure accurately. SOLUTION: The device includes a Pirani vacuum gage 10 for outputting an electric signal corresponding to the gas pressure; an operation device (CPU) for calculating a conversion formula for determining the gas pressure from an output from the Pirani vacuum gage 1; and the second pressure gage 100 arranged close to the Pirani vacuum gage, for measuring the gas pressure. The second pressure gage 100 measures the gas pressure in a narrower range than a pressure measuring range of the Pirani vacuum gage 10, and the operation device (CPU) calculates the conversion formula applicable to the whole pressure measuring range of the Pirani vacuum gage 10 by using gas pressure measurement results by the second pressure gage. COPYRIGHT: (C)2008,JPO&INPIT
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