摘要 |
PROBLEM TO BE SOLVED: To house a detection element and a compensation element by one-action operation without losing gas sensitivity and impact resistance to easily mount them in a catalytic combustion gas sensor. SOLUTION: A heater part is formed on the slits, which pierce an insulating substrate so as to crosslink the slits and a sintered member comprising a catalyst material is exposed to the surface of the substrate while covering the heater part and the slits. The finally formed gas sensor is enhanced in impact resistance and the response speed to a detection target gas, and electrodes taking the continuity with respective elements are intensified to the surface of the substrate to facilitate the mounting of the respective elements. COPYRIGHT: (C)2008,JPO&INPIT
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