| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope that can shorten the dimension in the height direction of a vacuum chamber portion for housing an electron gun, and avoid erroneous wiring and connection error caused by use of a cable for the connection between a high voltage power supply circuit and the electron gun.SOLUTION: A lid plate 43 for opening/closing an opening at the upper portion of a vacuum chamber 41 is also used to serve as a relay board, and a contact 48 is provided at the lid plate 43 side. Accordingly, a pin is secured to the upper portion of an electron gun 44 which is disposed at the upper side inside the vacuum chamber 41, and when the lid plate 43 is closed, the contact 48 elastically receives the pin, and both the contact and the pin are electrically connected to each other.SELECTED DRAWING: Figure 3 |
