| 摘要 |
PROBLEM TO BE SOLVED: To suppress generation of foreign matter, in ashing using a plasma processing apparatus in a silica tube.SOLUTION: A method performing the ashing includes a step for heating an object to be processed housed in the processing container of a plasma processing apparatus, where rare gas is supplied into a silica tube and the processing container, pressure in the space of the silica tube is set to a first pressure, and the object to be processed is heated without generating plasma in the silica tube, and a step for generating plasma of HO in the silica tube, following to the step for heating the object to be processed, in a state where the pressure in the space of the silica tube is set to a second pressure lower than the first pressure.SELECTED DRAWING: Figure 1 |
