Multipole lens, method of fabricating same, and charged particle beam system

摘要

There is disclosed a method of fabricating a smaller-sized multipole lens having polar elements that can be formed with high accuracy. The method starts with forming a first member (10) having a first yoke (14) formed integrally with first polar elements (12). A second member (20) having a second yoke (24) formed integrally with second polar elements (22) is formed. The first yoke (14) is made to overlap with the second yoke (24). The first member (10) and the second member (20) are held.

主权项

1. A method of fabricating a multipole lens, comprising the steps of:
forming a first member having a first yoke formed integrally with at least one first polar element; forming a second member having a second yoke formed integrally with at least one second polar element; and making the first yoke overlap with the second yoke and holding the first member and the second member, wherein said first yoke and said second yoke are hollow and cylindrically shaped, and wherein said first polar element and said second polar element are located inside said first yoke and said second yoke, respectively, and wherein the first polar element and the second polar element are alternately arranged along a virtual circle centered at the center of the multipole lens when the first and second members are held together.