摘要 |
PURPOSE: To provide a probe device for testing circuit that can be repaired and where parts can be replaced easily by separating an analog signal from a digital signal and taking it out properly and achieving impedance matching that is required for an analog test under a device environment where the analog signal and digital signal exist in a mix. CONSTITUTION: A coaxial probe structure body 34 is mounted to a frame member 32 that is fixed to a coaxial probe card 14 and contacts the contact pad of a device board 20 to be tested where the device under testing is placed so that an analog signal can be exchanged with the host controller of a test system. The coaxial probe structure body is inserted into one edge of an opening that is formed at the frame member, has a connector 110 that is electrically connected to a conductive path on a circuit substrate and a coaxial probe 1 12 that is mechanically and electrically connected to the connector, thus achieving an impedance matching signal path for transmitting signals. |