Imaging optics

摘要

An imaging optics has a plurality of mirrors to image an object field in an object plane into an image field in an image plane. At least one of the mirrors has a through opening for the passage of imaging light. An arrangement of the mirrors is such that principal rays run parallel or divergently in the beam path of the imaging light between the object plane and the first downstream mirror. The imaging optics can have an entrance pupil plane that lies in the beam path of the imaging light in the range of between 5 m and 2000 m in front of the object plane. The imaging optics can have an entrance pupil plane that lies in the beam path of the imaging light in the range of between 100 mm and 5000 mm in front of the object plane. Imaging optics with improved imaging quality are provided.

主权项

1. An imaging optics, comprising:
a plurality of mirrors configured to image an object field in an object plane into an image field in an image plane along a beam path of imaging light, at least one of the mirrors having an opening configured to allow the imaging light to pass therethrough, wherein:
the imaging optics has an entrance pupil plane that lies in the beam path of the imaging light between 5 m and 2000 m in front of the object plane;the plurality of mirrors are configured to image a center point of the object field into a center point of the image field;the plurality of mirrors comprises a second to last mirror along the beam path of imaging light;an axis passes the center of the second to last mirror in a direction perpendicular to the image plane;the center point of the image field lies on the axis; andthe imaging optics is configured to be used in microlithography.