| 摘要 |
<p>PURPOSE:To provide a dicing device capable of monitoring a kerf at a real time at all time. CONSTITUTION:A table 15 movably installed to a main body, a cutting section 11 having a cutting edge 20 and machining a kerf 22A to a work 22, an ultrasonic-wave transmitting and receiving section 12, which is mounted to the upper section of the kerf 22A and movably in the direction orthogonal to the kerf 22A, transmits ultrasonic waves over the kerf 22A and receives reflected ultrasonic waves, a detecting section 13 outputting an ultrasonic-wave oscillation signal to the ultrasonic-wave transmitting and receiving section 12 while detecting the shape of the kerf 22A on the basis of the ultrasonic-wave oscillation signal and an ultrasonic-wave receiving signal, and a moving means 14 shifting the ultrasonic-wave transmitting and receiving section 12 while being crossed at a right angle to the kerf 22A are provided, and the kerf 22A is monitored at a real time at all times.</p> |
