发明名称 MANUFACTURE OF FLAT TYPE ELECTRON EMITTING ELEMENT
摘要 <p>PURPOSE:To prevent a cathode for emitting an electron beam in a flat type display from falling off out of a main surface of a substrate during a manufacturing process such as ultrasonic cleaning. CONSTITUTION:An opening portion 25 for exposing a main surface of a substrate 21 is formed in a gate electrode 23 and a silicon oxide film, and a chrome thin film 2 as a metal contact film is formed in a step before a cathode is formed in a bottom portion 25b inside the opening portion 25. Consequently, the cathode is formed on the chrome thin film 2 serving as the metal contact film, thus preventing the cathode from falling off during a manufacturing process.</p>
申请公布号 JPH04284327(A) 申请公布日期 1992.10.08
申请号 JP19910072198 申请日期 1991.03.13
申请人 SONY CORP 发明人 TO YOICHI;WATANABE HIDETOSHI
分类号 H01J1/304;H01J9/02 主分类号 H01J1/304
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