APPARATUS FOR THERMAL TUNING OF PATH LENGTH CONTROL DRIVERS

摘要

A path length control driver apparatus includes a base plate having a first central member having first and second opposite ends, a first outer rim member and a first flexible annular diaphragm area having first and second opposite sides. The first flexible annular diaphragm area is between and integral with the first central member and the first outer rim member. A central axis passes centrally through the first and second opposite ends of the first central member. A first piezoelectric ceramic material has first and second opposing sides and the first side of the first piezoelectric ceramic material is rigidly affixed to the first flexible annular diaphragm area's first side. A second piezoelectric ceramic material has first and second opposing sides and the first side of the second piezoelectric ceramic material is rigidly affixed to the first flexible annular diaphragm area's second side. A first annular ring electrode is rigidly affixed to the second side of the first piezoelectric ceramic material, and a second annular ring electrode is rigidly affixed to the second side of the second piezoelectric ceramic material. The first and second electrodes have selected annular ring widths of different sizes to provide a selected temperature sensitivity of movement of the central member along the central axis.