| 摘要 |
PURPOSE:To enable a gas life of an excimer laser device to be extended and a high-quality beam to be attained by eliminating a fine particle which induces deterioration of discharge or deterioration of gas efficiently and without disturbing as flow. CONSTITUTION:In an excimer laser device, an electrode 2 which is sputtered by discharge is constituted by Ni, etc., which are rich in halogen resistance property, an electromagnet 9 or a permanent magnet 9 is used as a filter for eliminating fine particles paying attention to the fact that the electrode material and a halide are magnetic bodies and at the same time a filter device 4 is placed on a side of a gas flow path without screening the gas circulation flow path directly. |
