发明名称 APPARATUS CONTROLLING FOR HEIGHT OF BUMP OF METAL WIRING FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To achieve that the height of bumps which are formed on the element formation face of a semiconductor wafer or on a lead wire by a TAB technique is made uniform within a definite range. CONSTITUTION:Bumps 2 are heated to a reflow state; parts protruding at the prescribed height or higher of the bumps 2 are made to adhere to the low- temperature surface of revolving roller 8 and are removed. When a semiconductor chip is mounted, it is possible to reduce the probability that a bonding defect is caused. A semiconductor chip which has been thrown away as a defective product due to an irregularity in the height of the bumps 2 in conventional cases can be used as a nondefective product.
申请公布号 JPH04317334(A) 申请公布日期 1992.11.09
申请号 JP19910111122 申请日期 1991.04.16
申请人 NIPPON STEEL CORP 发明人 KAWASAKI ATSUSHI
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
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