| 摘要 |
<p>PURPOSE:To obtain a sensor for measuring a rotary motion and a linear motion of a traveling body. CONSTITUTION:A pressure sensor 2 is constituted by filling a sealing liquid into a ring-shaped groove 3 which is formed inside a silicon substrate 2a, a pressure-sensing portion 5 which is formed by a plurality of pairs of caves which are formed at an equal interval at an outer periphery and an inner periphery of the ring groove 3 and a surface of a substrate 2b, a conduit 4 which interlocks a plurality of caves and the ring groove 3, the ring groove 3, and a plurality of pairs of caves and the conduit 4. Three pressure sensors 2 are crossed mutually and placed, thus enabling a pressure caused by angular velocity and acceleration which are applied to the pressure sensor to be calculated by operation means.</p> |
