| 摘要 |
PURPOSE:To offer a hard multilayered formed body improved in wear resistance and self-lubricity. CONSTITUTION:A titanium compound bard film layer 2 having wear resistance, titanium compound gradient component layer 3, and self-lubricity film layer consisting essentially of hard amorphous carbon layer 4 are successively formed on a surface of a substrate 1, and every layer is formed by plasma CVD method, the first layer is formed at about 500 deg.C and second and third layer are formed at 250-400 deg.C successively upon keeping the vacuum condition. |
