| 摘要 |
PURPOSE:To manufacture a ceramic heater of which both surfaces are flat and without protruding an electrode part by contriving uniformity of temperature distribution in a base unit of the ceramic heater, internally furnished with a heating resistor by laminating an AlN substrate, utilizing bear holes as a method of taking out the electrode part to the outside and providing a notch in a brazing part of the electrode part to an external wiring. CONSTITUTION:The first layer substrate 1 has a heating resistor 6 and a terminal 7 in an upper total surface of a ceramic substrate 5. In the second layer substrate 2 has a heating resistor 9 in a peripheral edge part in an upper surface of a ceramic substrate 8. The third layer substrate 3 has vertical through viaholes 13 in a ceramic substrate 12. In the fourth layer substrate 4, the terminal 7 of the first layer substrate 1, having a notch 15, is provided in a position opposed to a beer hole 10 of the second layer substrate 2. A terminal 11 of the second layer substrate 2 is provided in a position opposed to the viahole 13 of the third layer substrate 3. The notch 15 of the fourth layer substrate 4 is provided in a position opposed to the viahole 13 of the third layer substrate 3. |
