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发明名称
ETCHING OF POLYIMIDE FILMS
摘要
申请公布号
GB1415083(A)
申请公布日期
1975.11.26
申请号
GB19730017778
申请日期
1973.04.12
申请人
BUCKBEE-MEARS CO
发明人
分类号
G03F7/26;C08J7/02;F25B31/02;G03F7/038;G03F7/095;G03F7/16;G03F7/32;H01L21/027;H01L21/30;H05K1/03;H05K3/00;H05K3/46;(IPC1-7):C09K13/00;C08J3/00
主分类号
G03F7/26
代理机构
代理人
主权项
地址
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