| 摘要 |
PURPOSE:To increase the reliability and to increase the energy efficiency, by simplifying the construction of the discharge part through positive utilization of the uniformity of discharge excitation and the stability of discharge. CONSTITUTION:The power for the grounded metal electrode 1, high voltage electrode 2 and dielectric substance 3 is increased than conventionally in proportional to the objective power, and the density of discharge power is almost taken the same for the discharge space 4. The laser light oscillated between the full reflection mirror 7 and the partial reflection mirror 8 changes angle with the full reflection mirrors 12 and 13, multiply reflects between two sets of full mirrors 14, 15 parallelly each other and is picked up with amplification. Since silent discharge is uniform and stable, no difference for the discharge is caused to the upper and lower stream of gas, and the full discharge space 4 is uniformly excited. Further, since the oscillating section at the upper stream of gas flow and the amplifier at the lower stream are closely constituted, the energy of the exciting molecules which had not been picked up at the oscillation section can effectively be picked up at the amplifying section, allowing to increase the energy efficiency. |
