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发明名称
METHOD OF PRODUCING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS556827(A)
申请公布日期
1980.01.18
申请号
JP19780078893
申请日期
1978.06.28
申请人
NIPPON ELECTRIC CO
发明人
ASAMI HIROSHI
分类号
H01L21/52;H01L21/28
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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