| 摘要 |
PURPOSE:To achieve a satisfactory inspection with a higher concentration of helium at a part required to be inspected in a helium hood, by mounting a manifold blowoff nozzle in a helium hood to blow a helium gas aiming at a part required to be inspected to an object to be measured. CONSTITUTION:First, an object 13 to be measured containing a part 14 required to be inspected of the object to be measured is evacuated with a rough suction pump 7 and a rough suction pump 6. Then, a helium hood 11 is lowered by an air cylinder 1 to cover the whole of the object 13 being measured containing the part 14 requiring inspected. Thereafter, a solenoid valve 4 for helium is opened to feed a helium gas into a helium hood 11 from a helium cylinder 5 and it is blown to the part 14 requiring inspection of the object 13 being measured from a blowoff nozzle 12 to make the concentration of the helium enough for a leak test. Then, the rough suction valve 6 is closed, a main suction valve 8 is opened to detect the leak with a leak detector 10. In this manner, the concentration of helium can be secured sufficiently, eliminating the possibility of a overlooking leak of above an allowable value. |
