| 摘要 |
<p>PURPOSE:To achieve higher analysis accuracy by arranging an optical system which makes infrared rays impinge into the surface of a sample at a specified angle of incidence, a detection system which detects outgoing light from a sample at a specified angle of emission and a sample base with a vertically moving mechanism to allow the introduction of infrared rays to the sample and a detector without falling in intensity. CONSTITUTION:A sample 1 having a foreign matter thereon is placed on a sample base 3 and infrared rays are directed directly onto the sample from a light source at a low angle of 10 deg. or less not through a mirror while the reflected light thereof is directed directly onto a detector at a low angle of 10 deg. or less not through the mirror. When the infrared ray incident light is focused on the foreign matter by moving a sample base shaft with a vertically moving mechanism 4, the infrared rays enters into the foreign matter to be absorbed and reflected on a metal surface of the sample to exit being absorbed again by the foreign matter. The absorption intensity and wavelength of the infrared rays are detected with a detector to analyze the foreign matter. The absence of the mirror and shorter distance from the light source to the detector enables the analyzing of the foreign matter without any drop in the intensity of infrared rays. The vertically moving mechanism 4 reduced in restriction on the thickness of the sample.</p> |
