NEUE POLYMERE MIT EINHEITEN AUS ESTERN VON (ALPHA),(BETA)-UNGESAETTIGTEN CARBONSAEUREN UND EIN MIT DIESEN POLYMEREN HERGESTELLTES STRAHLUNGSEMPFINDLICHES GEMISCH

摘要

The invention concerns new polymers with units consisting of esters of alpha , beta -unsaturated carboxylic acids and a positively acting radiation-sensitive mixture which contains these polymers as binders and is insoluble or at least only slightly soluble in water or in aqueous-alkaline solutions. The mixture also contains a photoactive compound which, when irradiated, releases a strong acid that splits off protective groups present in the binder and causes a sharp increase in the solubility of the binder, and hence of the mixture, in aqueous-alkaline solution. The mixture is sensitive to UV, electron and X-radiation and is particularly suitable for use as a resist material. The invention also concerns new esters of alpha , beta -unsaturated carboxylic acids from which these polymers are constructed. The invention further concerns a positively or negatively acting radiation-sensitive recording material with a carrier on which a positively or negatively acting layer containing the radiation-sensitive mixture of the invention is located.