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发明名称
VERTICAL LIQUID PHASE EPITAXIAL GROWTH METHOD AND SYSTEM THEREFOR
摘要
申请公布号
JPH07315982(A)
申请公布日期
1995.12.05
申请号
JP19940134891
申请日期
1994.05.26
申请人
SHOWA DENKO KK
发明人
YOSHINAGA ATSUSHI
分类号
C30B19/00;H01L21/208;(IPC1-7):C30B19/00
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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