发明名称 Control system
摘要 <p>A wire-bonding process for bonding a wire 8 to a contact surface of an electrical or electronic component 10, comprises supplying ultrasonic energy to a bonding tool 2 mounted on an ultrasonic transducer 6, the bonding tool 2 being arranged to press the wire 8 against the contact surface of the electrical or electronic component 10, and monitoring the deformation of the wire 8. The level and duration of the supply of ultrasonic energy and optionally the magnitude of the bonding force are continuously controlled during the bonding process in response to the deformation of the wire, in a closed loop system. <IMAGE></p>
申请公布号 EP0540189(B1) 申请公布日期 1997.01.15
申请号 EP19920309080 申请日期 1992.10.05
申请人 F & K DELVOTEC BONDTECHNIK GMBH 发明人 FARASSAT, FARHAD
分类号 B23K20/10;H01L21/60;H01L21/607;(IPC1-7):B23K20/10 主分类号 B23K20/10
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