| 摘要 |
For surface analysis of a sample 17, a spectrometer comprises an energy analyser 5, e.g. a hemispherical analyser, for analysing the energies of charged particles liberated from the sample, e.g. by x-rays 71, a lens 19, e.g. a quadruple electrostatic lens, arranged to project a diffraction image of the analysis area at the input plane 7 of the analyser and a detector for detecting the charged particles 65. The analyser and lens are arranged to generate an image at the detector in which the charged particles are distributed along a first, e.g. circumferential, direction according to their emission angles and are distributed along another, e.g. radial, direction according to their energies. The detector 65 is arranged to detect the distribution of charged particles in the image along the first direction to provide angle resolved energy spectra. A pre-analysis objective lens 13 for collecting and focusing the charged particles over a range of emission angles may also be provided, the lens 13 including a mesh electrode 31 having a convex section 33. |
