发明名称 Semiconductor device having recessed gate structures and method of manufacturing the same
摘要 A gate structure including semiconductor regions each having a high impurity-concentration and being formed within respective one of recessed portions provided in a surface of a first semiconductor substrate, and then a second semiconductor substrate is brought into contact with the surface of the first semiconductor substrate. The gate structure may be formed such that each of the recessed portions is completely or partially filled with the gate structure. When the gate structure includes electrically good-conductive films of a high melting point metal or the like each formed in respective one of the recessed portions, the gate resistance can be further decreased.
申请公布号 US5894140(A) 申请公布日期 1999.04.13
申请号 US19950483589 申请日期 1995.06.07
申请人 NGK INSULATORS, LTD. 发明人 TERASAWA, YOSHIO
分类号 H01L29/744;H01L21/329;H01L21/331;H01L21/332;H01L21/336;H01L29/739;H01L29/74;H01L29/772;H01L29/78;(IPC1-7):H01L29/74;H01L31/111 主分类号 H01L29/744
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