APPARATUS OF THE FAILURE DECTECTION OF THE ELECTRODES AND SNUBBER CIRCUITS RELATED TO THE ION SOURCES

摘要

An apparatus for detecting failure of an electrode and an electrode protecting device related to ion sources is provided to protect ion sources by replacing the electrode protecting device with the trouble by including a plurality of electrode protecting devices. A remote detecting apparatus(1) includes an electrode protecting unit(10), a test power supply unit(60), an insulation detecting unit(80), a switching unit and a controller. The electrode protecting unit protects the ion source by absorbing a surge voltage that is a failure voltage induced to a transmission line as a transient voltage which is changed for a short time. The insulation detection unit detects damage between electrodes connected to ion sources to output the beam by using arc plasma. The test power supply unit verifies the ion source electrode and the electrode protecting unit for protecting the electrode. The switching unit is selectively connected to each component. The controller controls each component and transmits the detected data remotely.