| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a semiconductor dynamic quantity sensor in which adhesion of a movable electrode or a weight part to a substrate is prevented even during operation. SOLUTION: A stopper part 50 projects partially from a substrate 1 entirely over the lower part of movable electrodes 7a, 7b, 8a and 8b, beam parts 4, 5 and a mass part 6. Consequently, adhesion between the movable electrodes 7a,..., and the substrate 1 can be prevented. When a lower electrode part 26 is formed on the substrate 1 at the lower part of the movable electrodes 7a,..., the beam parts 4, 5 and the mass part 6 and the potential at the lower electrode part 26 and a beam structure 2A is equalized through anchor parts 3a, 3b, potential difference does not appear between the electrodes 7a,..., and the substrate 1 and electrostatic adhesion between the electrodes 7a,..., and the substrate 1 can be prevented.</p> |
