Electron beam exposure apparatus and method,申请号EP19970118465-传众专利搜索

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发明名称	Electron beam exposure apparatus and method
摘要
申请公布号	EP0838837(A3)	申请公布日期	2000.03.08
申请号	EP19970118465	申请日期	1997.10.23
申请人	CANON KABUSHIKI KAISHA	发明人	TERASHIMA, SHIGERU;MURAKI, MASATO;OKUNUKI, MASAHIKO;MIYAKE, AKIRA;MATSUI, SHIN
分类号	H01J37/317;(IPC1-7):H01J37/317;H01J37/30;H01L21/30;H01J37/302;H01J37/304	主分类号	H01J37/317
代理机构		代理人
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