SET UP CUP ASSEMBLY OF ION INJECTION EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A set up cup assembly of an ion injection equipment for manufacturing a semiconductor device is provided to perform a precise operation of an equipment by detecting a varied location of an ion beam measurement cup. CONSTITUTION: A setup cup assembly of an ion injection equipment for manufacturing a semiconductor device comprises a location appreciation sensor for detecting precisely a location according to the variation between an in-position and an out-position of an ion beam measurement cup. In order to detect a location of an ion beam measurement cup(13) disposed to an one side end portion of a piston axis(12), a guide(18) is disposed to other side end portion of the piston axis. A sensor flag(21) is disposed to the guide. A first location appreciation sensor(23) and a second location appreciation sensor(24) are contacted with the sensor flag.