| 摘要 |
PURPOSE: A method for manufacturing an actuated mirror arrays(AMA) is provided to enhance driving characteristics of an actuator through an exact forming of a first and a second contorted beds and to prevent point defects of pixels by removing polymer occurred during an etching process for patterning of a second layer. CONSTITUTION: An active matrix(100) including a first metal layer(135) is provided. A first layer, a lower electrode layer(180), a second layer, and an upper electrode layer are formed on the active matrix(100). A first upper electrode(200) and a second upper electrode are formed by patterning the upper electrode layer. The second layer is patterned into a first contorted bed(190) and a second contorted bed. Polymer occurring during the second layer is removed. An actuator(210) is formed by patterning the lower electrode(180). A support part(170) is formed by patterning the first layer. A second sacrificial layer(300) is formed, patterned to form a mirror(260) thereon.
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