| 摘要 |
PROBLEM TO BE SOLVED: To make possible the reduction in weight, a high response speed, and a displacement in the order of submicrons by forming a structure with a base having a hole and an electromechanical transducing element laid on top of the base and deforming part of the structure by resonance oscillation or forced oscillation of the structure. SOLUTION: A hole 2 is formed in a base 1 and then an electromechanical transducing element 3 is laid on top of the base to form a structure. As for the material of the electromechanical transducing element 3, PZT (lead zirconate titanate) piezoelectric ceramic is preferably used. Flexural oscillation is generated by pasting together the electromechanical transducing element 3 which is deformed by an electric field and a diaphragm 5 which is not deformed by an electric field. For the electromechanical transducing layer, a multilayer piezoelectric element (inside electrodes are disposed like interlaced fingers and the film thickness of one layer of piezoelectric material is about 30 μm) is used. With this displacement element which has a small-size structure, flexural oscillation due to a piezoelectric transverse effect has a high response speed and a displacement of about 0.5 micron is available. |
