发明名称 INTERCONNECTION STRUCTURE OF SEMICONDUCTOR DEVICE AND ITS DESIGNING METHOD
摘要 PROBLEM TO BE SOLVED: To provide the interconnection structure of a semiconductor device, and its designing method, in which layout area can be reduced while interrupting clock noise surely. SOLUTION: In the interconnection structure of a semiconductor device comprising clock lines 10, lattice-like VDD lines 12 and GND lines 14, inner interconnection parts 12V, 14V and 12P, 14P of the VDD lines 12 and GND lines 14 are arranged, in parallel with the clock lines 10, as interconnection pairs each interlaying the clock line 10 so that they also serve as shielding and interconnecting parts for supplying power and interrupting noise caused by a clock signal.
申请公布号 JP2002158335(A) 申请公布日期 2002.05.31
申请号 JP20000355495 申请日期 2000.11.22
申请人 TOSHIBA CORP 发明人 HATANAKA KOJIRO
分类号 H01L21/822;H01L21/82;H01L27/04;(IPC1-7):H01L27/04 主分类号 H01L21/822
代理机构 代理人
主权项
地址