| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of drying a waferby by utilizing the marangoni effect which quickly dries with improved efficientcy in drying the wafer and a drier. SOLUTION: In a wafer drying process utilizing the marangoni effect, an isopropyl alcohol liquid 222 is heated and supplied in a liquid phase to the upside of a cleaning liquid. The liquid 222 supplied in liquid phase is diffused at a high speed to form an isopropyl alcohol liquid layer. Owing to the heated isopropyl alcohol supplied, the wafer can be adequately dried even when only heated nitrogen gas is supplied for drying the cleaning liquid. Thus, the efficiency in the drying process can be improved by quickly forming the isopropyl alcohol liquid layer.
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