| 摘要 |
PROBLEM TO BE SOLVED: To provide a ferroelectric capacitor having superior characteristics. SOLUTION: The capacitor comprises a silicon oxide layer 4, a lower electrode 12, a ferroelectric layer 8 and an upper electrode 15 on a silicon substrate 2. An alloy layer of the lower electrode 12 can take an adequate lattice constant according to the kind or composition of the ferroelectric layer 8, thereby obtaining a ferroelectric layer 8 which has superior characteristics.
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