| 摘要 |
PROBLEM TO BE SOLVED: To prevent deviation of irradiation point on a target surface of an electron beam generated when a spacer for maintaining a gap within an envelope is arranged in the envelope. SOLUTION: An electron source 11 provided with electron emitting elements has a fluorescent film 18 which emits light by collision of electrons, and a metal back electrode 19 which controls electrons emitted from the electron source 11 are disposed opposing with each other. A spacer 20 as a structure which supports the electron source 11 and the metal back electrode 19 against atmospheric pressure is disposed between them. Semiconductive films 20b are formed on surface of an insulating member 20a to constitute the spacer 20, and these semiconductive films 20b are connected electrically to the electron source 11 and the metal back electrode 19.
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