发明名称 THIN FILM TRANSISTOR SELF-ALIGNED TO A LIGHT-SHIELD LAYER
摘要 <p>A method of manufacturing a thin film transistor with a reduced number of manufacturing steps is provided, in which the possibility of light entering the channel forming layer of the thin film transistor can be obviated. The thin film transistor comprising a gate electrode (16a), a drain electrode (12a), a source electrode (17a) and a channel (24) and a shield layer (21) on a transparent substrate (20). The channel (24) is formed in that a channel forming layer is photolithographically patterned with the shield layer (21) as mask. As shield layer (21), the gate electrode (16a) can be used, this giving a bottom gate thin film transistor. The transistor is very suitable for use in a liquid crystal display.</p>
申请公布号 WO02091455(A1) 申请公布日期 2002.11.14
申请号 WO2002IB01581 申请日期 2002.05.06
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V.;YUKAWA, TEIZO 发明人 YUKAWA, TEIZO
分类号 G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L21/336 主分类号 G02F1/1368
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