| 摘要 |
PROBLEM TO BE SOLVED: To provide a quadratic surface shape measuring apparatus capable of removing alignment errors which have occurs due to alignment deviations of an object to be measured and a return mirror from surface shape measurement data on the object to be measured. SOLUTION: The quadratic surface shape measuring apparatus is provided with: a phase distribution computing means for computing errors in the shape of the object to be measured as surface shape measurement data with respect to a reference surface on the basis of information on interference fringe phase distributions; an alignment error computing means for computing information on alignment errors which occur due to alignment deviations of a quadratic surface shape and the return mirror on the basis of the information on interference fringe phase distributions and the design shapes of the quadratic surface shape and the return mirror; and a surface shape computing means for removing the alignment error information from the surface shape measurement data. COPYRIGHT: (C)2005,JPO&NCIPI
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