| 摘要 |
PROBLEM TO BE SOLVED: To efficiently remove bubbles on the surface of a filter while preventing an apparatus from being made large sized. SOLUTION: Granular members 10 arranged in the inlet surface side of a resist filter 8 are provided in a resist filtration apparatus 4. The bubbles 11 are removed from the surface of the resist filter 8 by discharging a resist R1 introduced in the resist filtration apparatus 4 through resist discharge pipes 6a and 6b to float the granular members 10 and to bring the granular members 10 into contact with the surface of the resist filter 8. COPYRIGHT: (C)2005,JPO&NCIPI
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