| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of performing the inspection work of a plurality of devices to be inspected as quickly as possible. SOLUTION: An inspection machine 21 inspects a plurality of organic EL displays D while being rotated around a rotation axis J1 in a state where the plurality of organic EL displays D are held on the curved surface of a maintenance wall 10 having a semi-cylindrical curved structure. Since the inspection device is different from a conventional inspection device for inspecting the plurality of organic EL displays while the inspection machine is linearly moved in two directions by using an XY stage, and the inspection machine 21 needs not be moved at the time of the inspection work, the time for the movement of the inspection machine 21 is not required. Therefore, the time required for inspection work by the movement time of the inspection machine 21 is reduced, and the time required for the inspection work of the plurality of organic EL displays D is reduced. COPYRIGHT: (C)2005,JPO&NCIPI |
