发明名称 MULTILAYER FILM
摘要 <p>This disclosure describes system (s) and/or method (s) enabling contacts 504, 704, 904, and/or 1102 for individual nanometer-scale-thickness layers 402, 602, 802, and/or 1105 of a multilayer film 1104. The contacts are formed during deposition of the layers using a shadow mask having protrusions 408.</p>
申请公布号 WO2006093727(A1) 申请公布日期 2006.09.08
申请号 WO2006US06120 申请日期 2006.02.22
申请人 HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.;KORNILOVICH, PAVEL;MARDILOVICH, PETER;RAMAMOORTHI, SRIRAM 发明人 KORNILOVICH, PAVEL;MARDILOVICH, PETER;RAMAMOORTHI, SRIRAM
分类号 H01L21/768 主分类号 H01L21/768
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