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发明名称
自电子元件基材表面剥除及清除含有机物之材料的方法
摘要
本发明系揭露一种自电子元件基材表面移除有机材料的方法。本方法对于包括有暴露金属之元件基材特别有用。根据本发明,电子元件基材表面系暴露于包含有溶于一溶剂中之浓度介于约45 ppm~约600 ppm的臭氧(O3)之溶液,且该溶剂由纯丙酸或混合有去离子水或具有2~4碳的碳酸盐之丙酸所组成。本发明之方法对于覆盖有元件结构的大型表面区域之制造系特别有用,例如:TFT平面显示器、太阳能电池阵列,以及含发光二极体之结构。本发明亦对于自含固态元件之半导体基材表面移除有机材料系为有用的。
申请公布号
TW200732054
申请公布日期
2007.09.01
申请号
TW095140300
申请日期
2006.10.31
申请人
应用材料股份有限公司
发明人
维哈佛贝可史帝文
分类号
B08B3/00(2006.01);C23D17/00(2006.01);C23G1/00(2006.01)
主分类号
B08B3/00(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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