| 摘要 |
A method of manufacturing an electro-optical device including a pair of substrates with an electro-optical material interposed therebetween includes forming an alignment film made of an inorganic material on a substrate surface of at least one of the substrates opposite to the electro-optical material by fixing an angle between the substrate surface and a scattering direction of the inorganic material to a predetermined value and performing a PVD method, in a processing chamber; and, after the PVD method starts, introducing at least one kind of repair gas for repairing defects of the alignment film into the processing chamber.
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