发明名称 MULTI-LEVEL CLEANSPACE FABRICATOR ELEVATOR SYSTEM
摘要 The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. In another aspect, the fabricator tool placement and replacement can be accomplished while maintaining a clean space environment about the fabricator tool.
申请公布号 WO2007025199(A3) 申请公布日期 2009.04.23
申请号 WO2006US33344 申请日期 2006.08.26
申请人 FLITSCH, FREDERICK, A. 发明人 FLITSCH, FREDERICK, A.
分类号 H01L21/677;B01L1/04;G06F19/00 主分类号 H01L21/677
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